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  • 姓名: 郑中山
  • 性别: 男
  • 职称: 副研究员
  • 职务: 
  • 学历: 博士
  • 电话: 82995522
  • 传真: 
  • 电子邮件: zhengzhongshan@ime.ac.cn
  • 所属部门: 硅器件与集成研发中心
  • 通讯地址: 北京市朝阳区北土城西路3号

    简  历:

  • 教育背景:

    2002.9-2005.6:中国科学院半导体研究所,博士研究生; 

    1986.9-1989.6:山东大学物理系固体物理专业,硕士研究生; 

    1982.9-1986.6:山东大学物理系,本科; 

    工作简历: 

    2010.10至今:中国科学院微电子研究所,副研究员; 

    1989.7-2010.9:济南大学任教,助教,讲师,副教授。 

    社会任职:

    研究方向:

  • 半导体材料与器件的辐射效应

    承担科研项目情况:

  • 1. 2005-2008: SOI材料的辐射效应及表征,济南大学博士基金; 

    2. 2011-2015: FD SOI技术的辐射效应研究,中科院项目课题; 

    3. 2015-2016: SOI器件的单粒子辐射效应模拟研究,复旦大学开放基金; 

    4. 2017-2019:高k材料的辐射效应研究,硅器件技术重点实验室基金。

    代表论著:

  • 1. Zheng, ZS; Liu, ZL; Zhang, GQ; Li, N; Li, GH; Ma, HZ; Zhang, EX; Zhang, ZX; Wang, X. Improvement of the radiation hardness of SIMOX buried layers using nitrogen implantation, Semiconductor Science and Technology, 2005, 20 (6): 481-484. 

    2. Zheng, ZS; Liu, ZL; Zhang, GQ et al. Effect of the technology of implanting nitrogen into buried oxide on the radiation hardness of the top gate oxide for partially depleted SOI MOSFET. Chinese Physics B, 2005, 14(3): 565-570. 

    3. Zheng, ZS; Liu, ZL; Zhang, GQ; Li, N; Fan, K; Zhang, EX; Yi, WB; Chen, M; Wang, X. Effects of techniques of implanting nitrogen into buried oxide on the characteristics of partially depleted SOI PMOSFET, Chinese Physics Letters, 2005, 22 (3): 654-656. 

    4. Zheng Zhong-Shan, Zhang En-Xia, Liu Zhong-Li et al. Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge density. Acta Physica Sinica, 2007, 56(9): 5446-5451. 

    5. Tang Hai-Ma, Zheng Zhong-Shan, Zhang En-Xia, Yu Fang, Li Ning and Wang Ning-Juan. Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers. Chinese Physics B, 2010, 19(10): 106106. 

    6. Zheng Zhong-Shan, Liu Zhong-Li, Yu Fang et al. Total dose radiation response of modified commercial silicon-on-insulator materials with nitrogen implanted buried oxide. Chinese Physics B, 2012, 21(11): 116104. 

    7. Zhang Bai-Qiang, Zheng Zhong-Shan,Yu Fang et al. Effect of co-implantation of nitrogen and fluorine on the fixed positive charge density of the buried oxide layer in SIMOX SOI materials. Acta Physica Sinica, 2013, 62(11): 117303. 

    8. Zhongshan ZhengZhentao LiNing Qiao et al. Reducing single event upset by lowering the threshold voltage of transistors. IEEE 12th International Conference on Solid-State and Integrated Circuit Technology (ICSICT), 2014. 

    9. Zheng Zhong-ShanLi Zhen-TaoQiao Ning et al. Comparison of decoupling resistors and capacitors for increasing the single event upset resistance of SRAM cells. IEEE 11th International Conference on ASIC (ASICON), 2015. 

    10. ZHAO Xing, ZHENG Zhong-Shan, LI Bin-Hong et al. Total dose radiation and annealing responses of the back transistor of Silicon-On-Insulator pMOSFETs. Chinese Physics C, 2015, 39(9): 096101, 1-7. 

    11. Zhongshan Zheng, Jin Ning, Baiqiang Zhang et al. The radiation hardness of the nitrogen-fluorine implanted buried oxide layer in silicon-on-insulator materials against higher total dose irradiation. SCIENCE CHINA Materials, 2016, 59(8): 657-664. 

    12. Zhong-Shan Zheng, Bin-Hong Li, Jian-Tou Gao, Jia-Jun Luo, Zheng-Sheng Han. Complexity of the Total Dose Radiation Response of Fully Depleted Silicon-On-Insulator NMOSFETs. IEEE 13th International Conference on Solid-State and Integrated Circuit Technology (ICSICT), 2016. 

    13. Zhongshan Zheng, Zhentao Li, Gengsheng Chen, Jiajun Luo, Zhengsheng Han. Roles of the Gate Length and Width of the Transistors in Increasing the Single Event Upset Resistance of SRAM cells. IEEE 12th International Conference on ASIC (ASICON), 2017. 

    14. Ling Yang , Qingzhu Zhang, Yunbo Huang, Zhongshan Zheng, Bo Li, Binhong Li, Xingyao Zhang, Huiping Zhu, Huaxiang Yin, Qi Guo, Jiajun Luo, and Zhengsheng Han. Total Ionizing Dose Response and Annealing Behavior of Bulk nFinFETs With ON-State Bias Irradiation. IEEE Transactions on Nuclear Science, 2018, 65(8): 1503. 

    15. H P Zhu, Z S Zheng, B Li, B H Li, G P Zhang, D L Li, J T Gao, L Yang, Y Cui, C P Liang, J J Luo and Z S Han. Total dose effect of Al2O3-based metal–oxide–semiconductor structures and its mechanism under gamma-ray irradiation. Semicond. Sci. Technol. 2018, 33: 115010. 

    16. Zhong-Shan Zheng, Zhen-Tao Li, Kai Zhao, Bo Li, Jia-Jun Luo, Zheng-Sheng Han. Correlation between the Decoupling Capacitor Layouts and Single-Event-Upset Resistances of SRAM cells. IEEE 14th International Conference on Solid-State and Integrated Circuit Technology, 2018. 

    17. Hui-Ping Zhu, Xi Chen, Zhong-Shan Zheng, Bo Li, Jian-Tou Gao, Duo-Li Li, Jia-Jun Luo, and Zheng-Sheng Han. Investigation of the relationship between the total dose effect and thickness of Al2O3 gate dielectric under gamma-ray irradiation. IEEE 14th International Conference on Solid-State and Integrated Circuit Technology, 2018. 

    18. J. Zhang, X. Chen, L. Wang, Z. S. Zheng, H. P. Zhu, B. Li, J. T. Gao, D. L. Li, J. J. Luo, Z. S. Han, C. Song, and X. Y. Liu. Studies of radiation effects in Al2O3-based metal-oxide-semiconductor structures induced by Si heavy ions. J. Appl. Phys. 2019, 125: 115701. 

    19. Zhongshan Zheng, Huiping Zhu, Xi Chen, Lei Wang, Bo Li, Jiantou Gao, Duoli Li, Jiajun Luo, Zhengsheng Han, Xinyu Liu, and Jie Liu. Combined Effects of Tantalum Ion and Gamma Ray Irradiations on MOS Devices with Atomic Layer Deposited Al2O3 Gate Dielectrics. Radiation and its Effects on Components and Systems (RADECS) 2019. 

    20. Zhongshan Zheng, Xing Zhao, Kai Zhao, Jiantou Gao, Binhong Li, Fang Yu, Bo Li, Jiajun Luo, Zhengsheng Han and Xinyu Liu. Comparison of the Total Dose Responses of Fully Depleted SOI nMOSFETs with Different Geometries for the Worst Case Bias Conditions. IEEE Transactions on Nuclear Science, 2019, DOI 10.1109/TNS.2019.2936607. 

    21. Zhongshan Zheng, Zhentao Li, Bo Li, Jiajun Luo, Zhengsheng Han. Influences of the Source and Drain Resistance of the MOSFETs on the Single Event Upset Hardness of SRAM cells. IEEE 13th International Conference on ASIC (ASICON), 2019.

    专利申请:

    获奖及荣誉:

  • 在济南大学任教期间,曾两次获得济南大学优秀教师荣誉称号。