| 论文编号: | 1725110120160046 |
| 论文题目: | Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering |
| 作者: | 明安杰 |
| 刊物名称: | IEEE NEMS2016 |
| 年: | 2016 |
| 期: | 1 |
| 页: | 978 |
| 联系作者: | 明安杰 |
| 论文编号: | 1725110120160046 |
| 论文题目: | Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering |
| 作者: | 明安杰 |
| 刊物名称: | IEEE NEMS2016 |
| 年: | 2016 |
| 期: | 1 |
| 页: | 978 |
| 联系作者: | 明安杰 |
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